Updates & Insights

Research on a Near-Atomic-Scale CMP Material Removal Rate Model for Single-Crystal Diamond

1. Processing Background and Technical Challenges Single-crystal diamond is one of the hardest and most chemically inert materials found in nature, with a Mohs hardness

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Formation Mechanism of Subsurface Damage in Single-Crystal Silicon Nano-Grinding and Process Control Strategies

1. Background and Challenges Single-crystal silicon is an indispensable core material in modern integrated circuit manufacturing. Its surface and subsurface quality directly determines the electrical

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Key Factors and Process Optimization in Mechano-Chemical Synergistic Polishing of Single-Crystal Silicon

1. Background and Challenges Single-crystal silicon serves as a foundational material in both semiconductor device manufacturing and precision optical systems. Its surface quality directly governs

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Research on the Effect of Trajectory Overlap Rate on Surface Uniformity in Magnetic Abrasive Finishing of Flat Surfaces

1. Processing Background and Core Challenges Magnetic Abrasive Finishing (MAF) is a flexible precision polishing technology that utilizes magnetic abrasive particles driven by magnetic field

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Breakthrough in Error Compensation for Ultra-Precision Aspheric Single-Point Diamond Turning

1. Machining Challenges: Precision Bottleneck in Two-Axis Control In the manufacturing of ultra-precision aspheric optical components, Single-Point Diamond Turning (SPDT) remains the dominant high-accuracy forming process.

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The Effect of Coolant on Surface Quality in SPDT Machining of KDP Crystals

1. Background and Machining Challenges KDP (potassium dihydrogen phosphate) crystals are indispensable key nonlinear optical materials in cutting-edge high-technology fields such as laser inertial confinement

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Application of Halbach Array-Based Magnetorheological Polishing Technology for K9 Optical Glass

1. Background and Processing Challenges K9 glass is one of the most widely used optical glass materials in precision optics manufacturing, commonly found in lenses, prisms,

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A Review of Hybrid Non-Traditional Assisted Ultra-Precision Single Point Diamond Turning

1. Technical Background and Processing Challenges Ultra-precision single point diamond turning (SPDT) remains one of the most critical manufacturing processes for optical component fabrication, capable

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Mechanism of Elastic Grinding and Polishing of Hard and Brittle Materials Under the Synergistic Effect of Bonded and Free Abrasives

1. Background and Processing Challenges Hard and brittle materials — including optical glass, sapphire, and silicon carbide — are extensively employed in semiconductor devices, optical

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Collaborative Control of Fracture Strength and Subsurface Damage in Ultra-Thin Silicon Wafer Grinding

I. Industry Background and Processing Challenges With the rapid advancement of three-dimensional integrated circuit (3D IC) packaging technology, the ultra-thinning of silicon wafers through grinding

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Optimization of Diamond Abrasive Dispersion in Electro-Fenton CMP Slurry and Design of Neutral Green Polishing Solution

1. Challenges of Conventional CMP Slurry Systems In chemical mechanical polishing (CMP) processes, the chemical formulation of the polishing slurry fundamentally determines both processing efficiency

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Predictive Modeling of Subsurface Damage Depth and Process Window Optimization in Workpiece Rotation Grinding of Silicon Wafers

1. Background and Challenges Workpiece Rotation Grinding has established itself as the dominant process for thinning and planarizing large-diameter silicon wafers in modern semiconductor manufacturing. However,

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